Undercut elimination in DUV negative systems: application to lithography and etching of metal levels.
| Autor: | Vinet, Francoise, Heitzmann, Michel, Mourier, Thierry, Poncet, Dominique, Previtali, Bernard, Vizioz, C., Paniez, Patrick J., Schiltz, Andre |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p82-91, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|