Measurement of a CD and sidewall angle artifact with two-dimensional CD AFM metrology.
| Autor: | Dixson, Ronald G., Sullivan, Neal T., Schneir, Jason, McWaid, Thomas H., Tsai, Vincent W., Prochazka, Jerry, Young, Michael |
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| Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p572-588, 17p |
| Databáze: | Complementary Index |
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