Scatterometry for CD measurements of etched structures.
| Autor: | Raymond, Christopher J., Naqvi, S. Sohail H., McNeil, John R. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p720-728, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Raymond, Christopher J., Naqvi, S. Sohail H., McNeil, John R. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p720-728, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|