New method for measuring the thickness and shape of a thin film simultaneously by combining interferometry and laser triangulation.
| Autor: | Zeng, LiJiang, Ohnuki, Takeshi, Matsumoto, Hirokazu, Kawachi, Keiji |
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| Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p203-210, 8p |
| Databáze: | Complementary Index |
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