Multilevel 3D patterning of stacked PMMA sheets for x-ray microlithography.
| Autor: | Calderon, Gina M., Morris, Kevin J., Vladimirsky, Olga, Vladimirsky, Yuli |
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| Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p231-235, 5p |
| Databáze: | Complementary Index |
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