Analytical techniques for examining reliability and failure mechanisms of barrier-coated encapsulated silicon pressure sensors exposed to harsh media.
| Autor: | Bitko, Gordon, Monk, David J., Maudie, Theresa, Stanerson, Dennis, Wertz, John, Matkin, Jeanene, Petrovic, Slobodan |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p248-258, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|