Force measurements of polysilicon thermal microactuators.
| Autor: | Reid, J. Robert, Bright, Victor M., Comtois, John H. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p296-306, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Reid, J. Robert, Bright, Victor M., Comtois, John H. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p296-306, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|