Lithography tricks and tribulations.
Autor: | Garofalo, Joseph G., Watson, Pat G., Trimble, Lee E., Cirelli, Raymond A., Colina, Albert, Grodnensky, Ilya M., Herrero, B., Dunbar, A., Peiffer, Frederick R., Takahashi, R., Tarascon-Auriol, Regine G., Yarbrough, Willie J., Zych, Ludwik J. |
---|---|
Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p311-322, 12p |
Databáze: | Complementary Index |
Externí odkaz: |