Trial of telemicromachining under SEM using ISDN.
| Autor: | Mitsuishi, Mamoru, Sugita, Naohiko, Hori, Toshio, Nagao, Takaaki, Hatamura, Yotaro |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p171-182, 12p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
| Autor: | Mitsuishi, Mamoru, Sugita, Naohiko, Hori, Toshio, Nagao, Takaaki, Hatamura, Yotaro |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p171-182, 12p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|