Evaluation of aliphatic 2-diazoketones as photoactive compounds for deep-UV lithography.
| Autor: | Schwartzkopf, George, Gabriel, Kathleen B., Covington, John B. |
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| Zdroj: | Proceedings of SPIE; Nov1990, Issue 1, p456-467, 12p |
| Databáze: | Complementary Index |
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