High-resolution positive photoresists: novolac molecular weight and molecular weight distribution effects.
| Autor: | Zampini, Anthony, Turci, Pamela, Cernigliaro, George J., Sandford, Harold F., Swanson, Gary J., Meister, Catherine C., Sinta, Roger F. |
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| Zdroj: | Proceedings of SPIE; Nov1990, Issue 1, p501-512, 12p |
| Databáze: | Complementary Index |
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