Platinum coating of an x-ray mirror for SR lithography.
| Autor: | Itabashi, Sei-ichi, Okada, Ikuo, Kaneko, Takashi, Matsuo, Seitaro, Yoshihara, Hideo |
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| Zdroj: | Proceedings of SPIE; Nov1990, Issue 1, p269-278, 10p |
| Databáze: | Complementary Index |
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