Assessment and application of focus drilling for DRAM contact hole fabrication.
| Autor: | Noelscher, Christoph, Jauzion-Graverolle, Franck, Henkel, Thomas |
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| Zdroj: | Proceedings of SPIE; Nov2008, Issue 1, p67920Q-67920Q-10, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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