Anisotropic transformation of the beam quality of DPSS lasers for shaping of a narrow line focus for laser crystallization of Si.
| Autor: | Ivanenko, Mikhail, Mikhailov, Alexei, Miklyaev, Yuri, Grimm, Wyacheslaw, Bagschik, Klaus, Hildebrandt, Andreas, Lissotschenko, Vitalij |
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| Zdroj: | Proceedings of SPIE; Nov2008, Issue 1, p68790P-68790P-10, 10p |
| Databáze: | Complementary Index |
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