An all-silicon channel waveguide fabricated using direct proton beam writing.

Autor: Teo, E. J., Bettiol, A. A., Breese, M. B. H., Yang, P. Y., Mashanovich, G. Z., Headley, W. R., Reed, G. T., Blackwood, D. J.
Zdroj: Proceedings of SPIE; Nov2008, Issue 1, p68980Q-68980Q-7, 7p
Databáze: Complementary Index