An all-silicon channel waveguide fabricated using direct proton beam writing.
Autor: | Teo, E. J., Bettiol, A. A., Breese, M. B. H., Yang, P. Y., Mashanovich, G. Z., Headley, W. R., Reed, G. T., Blackwood, D. J. |
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Zdroj: | Proceedings of SPIE; Nov2008, Issue 1, p68980Q-68980Q-7, 7p |
Databáze: | Complementary Index |
Externí odkaz: |