Excimer laser projection photoablation and lift-off process for patterning of indium-tin-oxide for cost-effective fabrication of flat-panel displays.
| Autor: | Chae, Junghun, Appasamy, Sreeram, Jain, Kanti |
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| Zdroj: | Proceedings of SPIE; Nov2008, Issue 1, p69110P-69110P-9, 9p |
| Databáze: | Complementary Index |
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