High resolution nanoimprint templates for dual damascene: fabrication and imprint results.
| Autor: | Irmscher, Mathias, Butschke, Joerg, Carpio, Ron, Chao, Brook, Jen, Wei-Lun, Koepernik, Corinna, Nedelmann, Lorenz, Owens, Jordan, Palmieri, Frank, Pritschow, Marcus, Reuter, Christian, Sailer, Holger, Satoodeh, Ken, Wetzel, Jeff, Wilks, Bruce, Willson, Grant |
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| Zdroj: | Proceedings of SPIE; Nov2008, Issue 1, p69210D-69210D-12, 12p |
| Databáze: | Complementary Index |
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