Impact of sampling on uncertainty: semiconductor dimensional metrology applications.
| Autor: | Bunday, Benjamin, Rijpers, Bart, Banke, Bill, Archie, Chas, Peterson, Ingrid B., Ukraintsev, Vladimir, Hingst, Thomas, Asano, Masafumi |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69220X-69220X-22, 22p |
| Databáze: | Complementary Index |
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