Ellipsometric inspection of the inner surface of pellicle-covered masks.
| Autor: | Lee, Sangyouk, Song, Chulgi, Rhim, Jusang, Lee, Hyoungjoo, Kyoung, Jaisun, Chin, Soobok, Ahn, Taehyuk, An, Ilsin |
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| Zdroj: | Proceedings of SPIE; Nov2008, Issue 1, p692227-692227-10, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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