In-line focus-dose monitoring for hyper NA imaging.
| Autor: | Loi, Sara, Fasciszewski Zeballos, Alejandro, Iessi, Umberto, Robinson, John, Izikson, Pavel, Mani, Antonio, Polli, Marco |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69223H-69223H-15, 15p |
| Databáze: | Complementary Index |
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