New high-index fluids: exploiting anomalous dispersion for immersion lithography.
| Autor: | Costner, Elizabeth A., Matsumoto, Kazuya, Long, Brian K., Taylor, J. Christopher, Wojtczak, William, Willson, C. Grant |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69230B-69230B-12, 12p |
| Databáze: | Complementary Index |
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