Anti-reflective coating for multipatterning lithography.
| Autor: | Guerrero, Douglas J., Gibbons, Steve, Lowes, Joyce, Mercado, Ramil |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69230X-69230X-7, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Guerrero, Douglas J., Gibbons, Steve, Lowes, Joyce, Mercado, Ramil |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69230X-69230X-7, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|