Split and design guidelines for double patterning.
| Autor: | Wiaux, Vincent, Verhaegen, Staf, Cheng, Shaunee, Iwamoto, Fumio, Jaenen, Patrick, Maenhoudt, Mireille, Matsuda, Takashi, Postnikov, Sergei, Vandenberghe, Geert |
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| Zdroj: | Proceedings of SPIE; Nov2008, Issue 1, p692409-692409-11, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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