Prediction of imaging performance of immersion lithography using high refractive index fluid.
| Autor: | Sato, Takashi, Itoh, Masamitsu, Mimotogi, Akiko, Mimotogi, Shoji, Sato, Kazuya, Tanaka, Satoshi |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69242F-69242F-8, 8p |
| Databáze: | Complementary Index |
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