Pattern centric OPC flow: a special RET flow with fast turn-around-time.
| Autor: | Wang, Tom, Wu, Joanne, Liu, Qingwei, Zhang, Gary, Wang, Benny, Su, Bo, Cheng, Guojie |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69243V-69243V-11, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|