Litho variations and their impact on the electrical yield of a 32nm node 6T SRAM cell.
| Autor: | Verhaegen, Staf, Cosemans, Stefan, Dusa, Mircea, Marchal, Pol, Nackaerts, Axel, Vandenberghe, Geert, Dehaene, Wim |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69250R-69250R-12, 12p |
| Databáze: | Complementary Index |
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