APF pitch-halving for 22nm logic cells using gridded design rules.
| Autor: | Smayling, Michael C., Bencher, Christopher, Chen, Hao D., Dai, Huixiong, Duane, Michael P. |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69251E-69251E-8, 8p |
| Databáze: | Complementary Index |
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