Phame: phase measurements on 45nm node phase shift features.
| Autor: | Buttgereit, Ute, Birkner, Robert, Seidel, Dirk, Perlitz, Sascha, Philipsen, Vicky, De Bisschop, Peter |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p70282Z-70282Z-8, 8p |
| Databáze: | Complementary Index |
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