Ultraviolet cross-link process using spin-coating materials for advanced planarization and sublimate defect reduction.
| Autor: | Takei, Satoshi, Muramatsu, Makoto, Horiguchi, Yusuke, Ohashi, Tomoya, Nakajima, Yasuyuki, Mano, Yuichi, Iwashita, Mitsuaki, Tsuchiya, Katsuhiro, Yamaguchi, Tadayuki |
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| Zdroj: | Proceedings of SPIE; Nov2008, Issue 1, p703010-703010-14, 14p |
| Databáze: | Complementary Index |
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