Experience using a double pass Shack-Hartmann set-up on a DUV high NA high performance lens.
| Autor: | Augustin, Markus, Müller-Pfeiffer, Stefan, Körner, Lienhard, Falkenstörfer, Oliver |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71020P-71020P-10, 10p |
| Databáze: | Complementary Index |
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