Study of EUVL mask defect repair using FIB-GAE method.
| Autor: | Amano, Tsuyoshi, Nishiyama, Yasushi, Shigemura, Hiroyuki, Terasawa, Tsuneo, Suga, Osamu, Shiina, Kensuke, Aramaki, Fumio, Hagiwara, Ryoji, Yasaka, Anto |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71222H-71222H-8, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|