Development of a 1.5D reference comparator for position and straightness metrology on photomasks.
| Autor: | Flügge, J., Köning, R., Weichert, Ch., Häßler-Grohne, W., Geckeler, R. D., Wiegmann, A., Schulz, M., Elster, C., Bosse, H. |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71222Y-71222Y-10, 10p |
| Databáze: | Complementary Index |
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