UV NIL template making and imprint evaluation.
| Autor: | Sasaki, Shiho, Hiraka, Takaaki, Mizuochi, Jun, Fujii, Akiko, Sakai, Yuko, Sutou, Takanori, Yusa, Satoshi, Kuriyama, Koki, Sakaki, Masashi, Morikawa, Yasutaka, Mohri, Hiroshi, Hayashi, Naoya |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71223P-71223P-6, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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