Development status of back-end process for UV-NIL template fabrication.
| Autor: | Inazuki, Yuichi, Itoh, Kimio, Hatakeyama, Sho, Kojima, Kouichirou, Kurihara, Masaaki, Morikawa, Yasutaka, Mohri, Hiroshi, Hayashi, Naoya |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71223Q-71223Q-8, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|