Acid-degradable hyperbranched polymer and its application in bottom anti-reflective coatings.

Autor: Mercado, Ramil-Marcelo L., Xu, Hao, Lowes, Joyce A., Meador, Jim D., Guerrero, Douglas J.
Zdroj: Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71402W-71402W-11, 11p
Databáze: Complementary Index