Acid-degradable hyperbranched polymer and its application in bottom anti-reflective coatings.
Autor: | Mercado, Ramil-Marcelo L., Xu, Hao, Lowes, Joyce A., Meador, Jim D., Guerrero, Douglas J. |
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Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71402W-71402W-11, 11p |
Databáze: | Complementary Index |
Externí odkaz: |