Bottom anti-reflective coating for hyper NA process: theory, application and material development.
| Autor: | Yao, Huirong, Cho, JoonYeon, Yin, Jian, Mullen, Salem, Lin, Guanyang, Neisser, Mark, Dammel, Ralph |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71402X-71402X-9, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|