Bottom anti-reflective coating for hyper NA process: theory, application and material development.
Autor: | Yao, Huirong, Cho, JoonYeon, Yin, Jian, Mullen, Salem, Lin, Guanyang, Neisser, Mark, Dammel, Ralph |
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Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71402X-71402X-9, 9p |
Databáze: | Complementary Index |
Externí odkaz: |