Model-free and model-based methods for dimensional metrology during the lifetime of a product.
| Autor: | Weidner, Peter, Kasic, Alexander, Hingst, Thomas, Ehlers, Carsten, Philipp, Sylke, Marschner, Thomas, Moert, Manfred |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71550Y-71550Y-8, 8p |
| Databáze: | Complementary Index |
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