Ultra-thin-film characterization with vacuum ultraviolet spectroscopic reflectometry (VUV-SR).
| Autor: | Burki, Ibrahim, Rivas, Cristian |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71552E-71552E-11, 11p |
| Databáze: | Complementary Index |
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