Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors.
| Autor: | Hill, S. B., Ermanoski, I., Tarrio, C., Lucatorto, T. B., Madey, T. E., Bajt, S., Fang, M., Chandhok, M. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65170G-65170G-12, 12p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|