Microdischarge EUV source array and illuminator design for a prototype lithography tool.
| Autor: | Jurczyk, B. E., Stubbers, R. A., Alman, D. A., Hudyma, R., Thomas, M. |
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| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65170T-65170T-8, 8p |
| Databáze: | Complementary Index |
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