Thermal management design and verification of collector optics into high-power EUV source systems.
| Autor: | Bianucci, Giovanni, Zocchi, Fabio E., Pirovano, Giorgio, Cassol, Gian Luca, Marioni, Fabio, Binda, Pietro, Porreca, Luca, Ahmad, Imtiaz, Bolshukhin, Denis, Schürmann, Max C. |
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| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65171S-65171S-12, 12p |
| Databáze: | Complementary Index |
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