Low-cost EUV collector development: design, process, and fabrication.
| Autor: | Venables, Ranju D., Goldstein, Michael, Engelhaupt, Darell, Lee, Sang H., Panning, Eric M. |
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| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65171T-65171T-11, 11p |
| Databáze: | Complementary Index |
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