Impact of interface treatment with assisted ion beam on Mo-Si multilayer formation for EUVL mask blanks.
| Autor: | Hiruma, Kenji, Tanaka, Yuusuke, Miyagaki, Shinji, Cullins, Jerry, Nishiyama, Iwao |
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| Zdroj: | Proceedings of SPIE; Nov2007, Issue 1, p651720-651720-10, 10p |
| Databáze: | Complementary Index |
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