Characterization of the tin-doped droplet laser plasma EUVL sources for HVM.
| Autor: | Takenoshita, Kazutoshi, George, Simi A., Schmid, Tobias, Koay, Chiew-Seng, Cunado, Jose, Bernath, Robert, Brown, Christopher, Al-Rabban, Moza M., Silfvast, William T., Richardson, Martin C. |
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| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65173O-65173O-9, 9p |
| Databáze: | Complementary Index |
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