Setting MRC rules: balancing inspection capabilities, defect sensitivity, and OPC.
| Autor: | Stobert, Ian, Bruce, James, Gheith, Mohamed, Seoud, Ahmed |
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| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65180B-65180B-9, 9p |
| Databáze: | Complementary Index |
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