Carbon nanotube metrology in a CD SEM.
| Autor: | Yates, Colin, Rueckes, Thomas, Carter, Richard J. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65180N-65180N-11, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Yates, Colin, Rueckes, Thomas, Carter, Richard J. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65180N-65180N-11, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|