Immersion-induced defect SEM-based library for fast baseline improvement and excursion.
| Autor: | Englard, Ilan, Stegen, Raf, Van Brederode, Erik, Vanoppen, Peter, Minnaert-Janssen, Ingrid, Duray, Frank, der Kinderen, Ted, Tanriseven, Gazi, Lamers, Inge, Mantecon, Mireia Blanco, Levin, Lior, Binyamini, Eitan, Raccah, Nurit, Dror, Shalev, Valfer, Eran, Rotlevi, Ofer, Schreutelkamp, Robert, Piech, Rich |
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| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65182G-65182G-9, 9p |
| Databáze: | Complementary Index |
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