High-resolution in-die metrology using beam profile reflectometry and ellipsometry.
| Autor: | Jun, Chungsam, Park, Jangik, Opsal, Jon, Pois, Heath, Kim, In-Kyo, Kim, Jung-Wook, Nicolaides, Lena |
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| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65183D-65183D-8, 8p |
| Databáze: | Complementary Index |
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