Image quality improvement in inspection systems using double integrator illumination.
| Autor: | Takada, Akira, Suzuki, Hitoshi, Tojo, Toru, Shibuya, Masato |
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| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65184B-65184B-9, 9p |
| Databáze: | Complementary Index |
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