Hybrid optical: electron-beam resists.
| Autor: | Lennon, D. M., Spector, S. J., Fedynyshyn, T. H., Lyszczarz, T. M., Rothschild, M., Thackeray, J., Spear-Alfonso, K. |
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| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65190H-65190H-10, 10p |
| Databáze: | Complementary Index |
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